Abstract
Microsystems technology (MST) encompasses technical systems consisting of functional components between 1-100 μm in size. The spectrum of functional elements integrated into microsystems ranges from electronic to mechanical, as well as optical and fluid components. © 2009 Springer Berlin Heidelberg.
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CITATION STYLE
APA
Heinze, L., Wybranski, B., John, L. G., & Fernholz, G. (2009). Microsystems technology. In Technology Guide: Principles - Applications - Trends (pp. 72–77). Springer Berlin Heidelberg. https://doi.org/10.1007/978-3-540-88546-7_15
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