State-of-the-art for nanomanufacturing using ion beam technology

Abstract

Ion-beam manufacturing is developing toward nanoaccuracy and nanoscale. In this regard, the concept and working principle of ion-beam manufacturing in nanoaccuracy and nanoscale are presented in this chapter. The key techniques for ion-beam manufacturing are discussed with an emphasis on their capabilities in the fabrication of micro-/nano-features. The corresponding typical applications involved in ion-beam manufacturing are provided. The recent developments in ion-beam-related instruments are given as well. Finally, the future trends for ion-beam manufacturing are predicted.