Micro-heater-Based Gas Sensors

Abstract

Microelectromechanical system (MEMS) technology has been promoting development of sensors. Micro-heaters, as typical MEMS devices, have been extensively researched for high-performance gas sensors in the past two decades. This chapter presents the design, fabrication, and characterization of micro-heaters with low power consumption, well-controlled temperature distribution, high mechanical strength, and long-term stability. Catalytic gas sensors and semiconductor gas sensors will be introduced with novel design and high performance. The goal of this chapter is to provide the reader with a general overview of microheaters and broader ways of designing better micro-heater-based gas sensors.