Fabrication and Layout of CMOS Integrated Circuits

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Abstract

High-speed CMOS circuit design is intimately related to the structures that can be fabricated on a silicon substrate and then be transferred to a manufacturing line for mass production. Many of the limitations found in modern chip design are related to the fabrication process.

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Fabrication and Layout of CMOS Integrated Circuits. (2006). In CMOS Logic Circuit Design (pp. 61–102). Kluwer Academic Publishers. https://doi.org/10.1007/0-306-47529-4_2

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