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Porous Silicon Formation by Anodization

  • Loni A
Springer International Publishing, (2014), 1-12
DOI: 10.1007/978-3-319-04508-5_2-1
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Abstract

The key aspects of porous silicon manufactured by anodization are reviewed, with the following subjects being addressed: anodization of different wafer types, wafer cell design, post-anodization handling requirements (rinsing/drying/storage), parameters affecting...

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APA

Loni, A. (2014). Porous Silicon Formation by Anodization. In Handbook of Porous Silicon (pp. 1–12). Springer International Publishing. https://doi.org/10.1007/978-3-319-04508-5_2-1

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