Direct synthesis of large scale A1N sheet

Abstract

Centimeter scale AlN sheet has been successfully synthesized by the direct nitridation method with an Al-NH3-N2-H2 system. The starting material is Al sheet with 16-300 micron thickness. Al sheet was gradually transformed into AlN sheet in a tube furnace with NH 3-N2-H2atmosphere at 900-1200°C. Synthesized a large scale AlN sheet has highly crystalline. The size of the AlN sheet with 30×100×0.0016mm has only AlN crystal phase. In microstructure analysis, there are fine AlN particles in an AlN sheet. AlN particle size decreased from 250 to 100 nm with decreasing reaction temperature in the tube furnace. Large scale AlN sheet synthesized at high reaction temperatures have low oxygen contents. © Published under licence by IOP Publishing Ltd.