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Micro-Fabrication of Gas Sensors

  • Spannhake J
  • Helwig A
  • Schulz O
  • et al.
Springer US, (2009), 1-46
DOI: 10.1007/978-0-387-09665-0_1
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Spannhake, J., Helwig, A., Schulz, O., & Müller, G. (2009). Micro-Fabrication of Gas Sensors. In Solid State Gas Sensing (pp. 1–46). Springer US. https://doi.org/10.1007/978-0-387-09665-0_1

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