Numerical aspects of grazing incidence XRF

Abstract

In this article, we give a different mathematical approach for background aspects of grazing incidence x-ray fluorescence, GIXRF for short. Our contribution comes from an applied point of view, in order to have a computer program to simulate the fluorescence intensity from a stacking of thin layer films. A typical ill-posed inverse problem is formulated. Our aim is to reconstruct the fluorescence intensity for a variety of grazing angle measurements. We rederive some classical equations pointing out the numerical aspects of the inversion procedure and giving new directions for direct in inverse algorithms. © Published under licence by IOP Publishing Ltd.