Tracking control of the Z-tilts error compensation stage of the nano-measuring machine using capacitor insertion method

Abstract

This paper deals with the design of the capacitor insertion method for the three degree-of-freedom (DOF) flexible and deformation mechanisms aimed to eliminate hysteresis effects in piezoelectric actuators. By inserting a capacitor in series with the piezoelectric actuator is applied a 3-DOF nanoprecision platform and laser-measuring systems. The Z-tilts(z, pitch, and roll motion) error compensation stage of the nano-measuring machine is accomplished. In addition, a high resolution laser interferometer is used to measure position accurately. Therefore, above the method is effectively applied to a piezoelectric actuator are presented that compensate substantial improvements in positioning control precision and control performance. With the aid of positioning control, this system provides +/-60nm positioning resolution over the total range of 1000nm and +/-0.1 arcsec angle resolution over the total range of 3 arcsec for the stage along the z-direction. © Springer-Verlag Berlin Heidelberg 2007.