Hollow cathode and hybrid atmospheric plasma sources

Abstract

Generation and features of the radio frequency (RF) hollow cathode discharge (HCD) are compared for the atmospheric and moderate pressures. The atmospheric-pressure plasma systems, fused hollow cathode (FHC) and hybrid hollow electrode-activated discharge (H-HEAD), are described. Examples of applications where both FHC and H-HEAD have already been employed are given, and potentials for new processes are discussed. © 2008 IUPAC.