Abstract
In this chapter, we review methods and applications of the FIB lift-out specimen preparation technique. A historical overview of the development of the technique is given. The ex-situ and in-situ lift-out techniques are described. Examples, advantages, and disadvantages of each of the techniques are presented. © 2005 Springer Science+Business Media, Inc.
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Giannuzzi, L. A., Kempshall, B. W., Schwarz, S. M., Lomness, J. K., Prenitzer, B. I., & Stevie, F. A. (2005). FIB lift-out specimen preparation techniques ex-situ and in-situ methods. In Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques and Practice (pp. 201–228). Springer US. https://doi.org/10.1007/0-387-23313-X_10
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