Integrated micro-optics

Abstract

Microelectromechanical systems (MEMS), as the name suggests, are predisposed to the use of electrons and mechanical movement. By adding optics to the palette of MEMS capabilities, the resultant micro-opto-electromechanical systems (MOEMS) or micro-opto-mechanical systems (MOMS) provide increased functionality while retaining the attractive features of MEMS technology. As the spectrum of potential applications can thus be substantially increased, research and development work on optical MEMS has recently seen considerable activity.[1,2] © 2006 Springer-Verlag Berlin Heidelberg.