Twin quintuplet surfaces in CVD diamond

Abstract

Chemical vapor deposition (CVD) of diamond films and wafers is a well established and flexible technology in which deposition parameters control the deposition rate as well as diamond properties, quality and shape. This article deals with surface morphology and crystallography of wafers, with emphasis on twin blocks and twin quintuples. In the study described here we have determined surface facet crystallography of two diamond wafers groups, one that contains Sigma 3 twin blocks and the other that has a large population of twin quintuplets. The tool used for the study is a scanning electron microscope (SEM) and the technique to identify surface crystallography involves only accurate tilting and surface observation. A basic knowledge of the twin structure enables accurate determination of surface crystallography.