Although a scanning electron microscope (SEM) has very low tolerance to being disturbed by vibration, it requires a chiller for operation. Isolating the SEM from its associated chiller vibration takes careful consideration. This paper presents a case study of the performance of several slab-on-grade configurations. These configurations were specifically constructed to support various water chiller units and other service equipment as well as various vibration sensitive microscopes in a high performance research facility. In this study, the slabs are subjected to shaker-induced harmonic loading similar to that of a water chiller unit used to cool a SEM. The actual performance will be discussed in the context of generic design criteria for sensitive equipment and the SEM manufacturer-specified design criteria.
CITATION STYLE
Barben, B. R., & Hanagan, L. M. (2015). Isolating a scanning electron microscope from chiller unit vibrations. In Conference Proceedings of the Society for Experimental Mechanics Series (Vol. 2, pp. 531–540). Springer New York LLC. https://doi.org/10.1007/978-3-319-15248-6_53
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