Atomic force microscopy (AFM) is an indispensable technique for nanoscale topographic imaging, as well as quantification of normal and lateral forces exerted on the AFM tip while interacting with the surface of materials. In order to measure these forces, an accurate determination of the normal and lateral forces exerted on the AFM cantilever is necessary. In this chapter, we present a critical review of various techniques for measuring cantilever stiffness in the normal and lateral/torsional directions in order to calibrate the normal and lateral forces exerted on AFM cantilevers. The key concepts of each technique are presented, along with a discussion of their advantages and disadvantages.
CITATION STYLE
Palacio, M. L. B., & Bhushan, B. (2017). Calibration of normal and lateral forces in cantilevers used in atomic force microscopy. In Nanotribology and Nanomechanics: An Introduction: Fourth Edition (pp. 95–134). Springer International Publishing. https://doi.org/10.1007/978-3-319-51433-8_3
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