A skin-wearable and self-powered laminated pressure sensor based on triboelectric nanogenerator for monitoring human motion

Abstract

Flexible and skin-wearable triboelectric nanogenerators (TENGs) have emerged as promising candidates for self-powered tactile and pressure sensors and mechanical energy harvesters due to their compatible design and ability to operate at low frequencies. Most research has focused on improving tribo-negative materials for flexible TENGs, given the limited options for tribo-positive materials. Achieving biocompatibility while maintaining the sensitivity and capability of energy harvesting is another critical issue for wearable sensors. Here, we report a TENG-based biocompatible and self-powered pressure sensor by simple fabrication of layer-by-layer deposition methods. The Laminated Flexible-TENG comprises polytetrafluoroethylene (PTFE) and polymethyl methacrylate (PMMA) films embedded within a flexible and biocompatible polydimethylsiloxane (PDMS) matrix. A nanostructured PDMS surface obtained by oxygen plasma facilitated the sputter deposition of a layered indium tin oxide copper electrode and a tribo-positive PMMA thin layer on top. The addition of the indium tin oxide layer to copper significantly improved the quality and performance of the indium tin oxide-copper electrode. Self-powered Laminated Flexible-TENGs demonstrated impressive pressure-sensing capabilities, featuring dual sensitivity of 7.287 V/kPa for low pressure and 0.663 V/kPa for higher pressure. Moreover, the PDMS-encapsulated TENG sensor effectively traced the physiological motions, such as wrist and finger bending, and efficiently harnessed the waste energy from everyday physical activities, such as walking and jogging. The maximum peak-to-peak voltages of 18.3 and 57.4 V were recorded during these motions. Encapsulated TENGs have broad potential in wearable technology, including healthcare, human-machine interfaces, and energizing microelectronics.