Methods of sensor fabrication are numerous and specific for each particular design. They comprise processing of semiconductors, optical components, metals, ceramics, and plastics. Here, we briefly overview some materials and the most popular processing techniques.
CITATION STYLE
Sensor Materials and Technologies. (2006). In Handbook of Modern Sensors (pp. 533–555). Springer-Verlag. https://doi.org/10.1007/0-387-21604-9_18
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