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1.2 - Position Encoding and Phase Control of Resonant 2D-MOEMS-Mirrors

  • Tortschanoff A
  • Frank A
  • Lenzhofer M
  • et al.
DOI: 10.5162/opto11/o1.2
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Tortschanoff, A., Frank, A., Lenzhofer, M., Kenda, A., Wildenhain, M., & Sandner, T. (2020). 1.2 - Position Encoding and Phase Control of Resonant 2D-MOEMS-Mirrors (pp. 22–26). AMA Service GmbH. https://doi.org/10.5162/opto11/o1.2

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