Atomic layer deposition of perovskites part 2: Designing next generation electronic applications

Abstract

From part one, we learned that perovskites are interesting materials with tunable properties. Here, four current applications are elaborated on; high-κ dielectrics, piezoelectrics, optoelectronics, and solar to energy conversion devices. To start with, we discuss perovskite based dynamic random-access memory (DRAM) capacitors, where ALD strontium titanate (STO) of thickness 10 nm can achieve dielectric constants (k) of up to 146. Next, we discuss ALD perovskite piezoelectric-based device design of nanoelectromechanical systems (NEMS) and microelectromechanical systems (MEMS). There is a renewed interest in barium-based ternary compounds which have piezoelectric coefficients up to 500 pC/ N. We further explore ALD perovskite-based solar photovoltaics (PVs), where conformal and uniform layers of lead sulfide (PbS) absorbing layers allow deposition on large surfaces, facilitating perovskite architectures with conversion efficiency reaching 20%. Finally, we learn how lanthanum-based perovskites can replace cerium oxide, which is currently utilized for thermo-chemical processes for solar to energy conversion. Subsequently, we discuss different characterization techniques allowing us to deepen our understanding of process property relationships eventually leading to further performance enhancements.