Combined scanning nanoindentation and tunneling microscope technique by means of semiconductive diamond Berkovich tip

Abstract

A combined Scanning Probe Microscope (SPM) - nanoindentation instrument enables submicron resolution indentation tests and in-situ scanning of structure surfaces. A newly developed technique is based on the scanning tunneling microscopy (STM) with integrated Berkovich diamond semiconductive tip. Diamond tips for a combined SPM were obtained using the developed procedure including the synthesis of the semiconductive borondoped diamond monocrystals by the temperature gradient method at high pressure - high temperature conditions and fabrication of the tips from these crystals considering their zonal structure. Separately grown semiconductive diamond single crystals were studied in order to find the best orientation of diamond crystals. Optimal scanning characteristics and experimental data errors were calculated by an analysis of the general functional dependence of the tunneling current from properties of the tip and specimen. Tests on the indentation and scanning of the gold film deposited on the silicon substrate employing the fabricated tips demonstrated their usability, acceptable resolution and sensitivity. © 2007 IOP Publishing Ltd.