Profile retrieval of a buried periodic structure using spin echo grazing incidence neutron scattering

Abstract

When the neutron scattering technique, Spin Echo Resolved Grazing Incidence Scattering (SERGIS) concept, was originally put forward by Rekveldt [Physica B 1135, 234-236 (1997)] and Felcher et al. [Proc. SPIE 4785, 164 (2002)], they recognized that the specular scattering and the off-specular scattering could be spatially separated due to the tight neutron beam collimation in the scattering plane, a necessity for any reflectometry experiment. In this Letter, we show that it is possible to make large area measurements of periodic grating structures using SERGIS in a number of interesting scenarios. The SERGIS data can be analyzed using a dynamical theory, which makes it possible to effectively retrieve the lateral profile of a commercial periodic diffraction grating. Interestingly, this is still the case even when that grating is buried beneath a highly deuterated poly(methyl methacrylate-D8) polymer layer. We also clearly demonstrate that the maximum sensitivity to lateral structures is achieved when the specular reflection from the grating is excluded from the data analysis, demonstrating a feature of SERGIS that was proposed over two decades ago.