Review of Sublimation Growth of SiC Bulk Crystals

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Abstract

The review on bulk growth of SiC includes a basic overview on the widely used physical vapor transport method for processing of 4H-SiC boules as well as the discussion of three current research topics: (a) Sublimation bulk growth of large area, freestanding cubic SiC, (b) in-situ Visualization of the PVT Process using 2D and 3D X-ray based imaging and (c) prediction of dislocation formation and motion in SiC using a continuum model of dislocation dynamics (CDD).

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Wellmann, P. J., Arzig, M., Ihle, J., Kollmuß, M., Steiner, J., Mauceri, M., … Sandfeld, S. (2022). Review of Sublimation Growth of SiC Bulk Crystals. In Materials Science Forum (Vol. 1062 MSF, pp. 104–112). Trans Tech Publications Ltd. https://doi.org/10.4028/p-05sz31

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