Ion–Solid Interactions and Image Formation

Abstract

Both electron and ion beams can be used to provide a number of different modes of imaging and microanalysis In every case, and in order to properly optimize and interpret the data generated by the instrument, it is necessary to know something about what kinds of beam interactions are involved, what information may be obtained from each, and how the signal yields and spatial resolution can be optimized in each case. Images whose origins are neither known nor understood can never be any more than just a pretty picture.