AlGaN nanowires with inverse taper for flexible DUV emitters

Abstract

Deep ultraviolet (DUV) AlGaN light-emitting diodes (LEDs) are promising alternatives for production of DUV light, offering many advantages over mercury arc lamps. In this work, AlGaN nanowires with an inverse taper profile were demonstrated through a wet etching process, enabling removal of the nanowires from the growth substrate in a novel peeling process to form flexible devices. AlGaN nanowires with taper angles of ~22° were obtained following a 70 min etch in AZ400K. Nanowire taper angle was studied as a function of etch time and nanowire top diameter. Nanowires with inverse taper were then embedded in a flexible polymer layer and removed from their growth substrate, which could enable development of high-efficiency flexible micro-LEDs. Released nanowires embedded within the polymer liftoff layer exhibit strain relaxation induced redshift due to reduction in piezoelectric polarization electric field intensity. The inverse taper structure was found to promote enhanced light extraction from the nanowire. The demonstrated flexible DUV emitters with inverse taper are shown to improve the device efficiency and allow for realization of flexible emitters through a novel fabrication process for the first time.