Development of GUI based test and measurement facilities for studying properties of MOS devices in clean room environment

Abstract

This article describes a Graphics User Interface (GUI), meant for setting up an integrated Test and Measurement (T&M) facility, to study different electrical properties of Metal Oxide Semiconductor (MOS) devices is designed using Matlab 7.5.0 (R2007b). While developing the GUI, a probe station, connected to a Keithley Switch Matrix, and two other instruments namely, a Keithley Semiconductor Parameter Analyzer (SPA) and an Agilent manufactured Inductance-(L) Capacitance-(C) Resistance-(R) (LCR) Bridge, also connected to the switch matrix are considered. All the instruments are controlled over General Purpose Interface Bus (GPIB) protocol through a controller PC. © 2013 Springer Science+Business Media.