Here we present the design of an amorphous silicon photodetector integrated with an ion-exchanged waveguide on the same glass substrate in order to obtain an evanescent waveguide sensor for on-chip biomolecular recognition in Lab-on-Chip applications. We studied the behaviour of a monochromatic light in a channel waveguide and its coupling into the thin-film sensor, using COMSOL Multiphysics. Simulations show that the presence of the photodiode’s insulation layer and transparent electrode strongly affects the coupling efficiency between the waveguide and the sensor.
CITATION STYLE
Buzzin, A., Asquini, R., Caputo, D., & de Cesare, G. (2018). Design of an Evanescent Waveguide Sensor Based on a-Si:H Photodiodes for Lab-on-Chip Applications. In Lecture Notes in Electrical Engineering (Vol. 457, pp. 137–142). Springer Verlag. https://doi.org/10.1007/978-3-319-66802-4_19
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