Universal complex model for estimation the beam current density of high voltage glow discharge electron guns

Abstract

The universal complex model to estimation the focal parameters of electron beams, formed by high voltage glow discharge electron guns, is proposed in the article. This complex model consists on the means for calculation of electric field distribution and charged particles trajectories with taking into account the space charge, means for defining the current density distribution in the beam focus on the outlet of electron gun, means for defining plasma boundary form and position, means for defining the beam trajectories in the guiding channel, as well as means for interpolation the beam trajectories in the space of free moving of electrons at the technological chamber. The results of simulation for the distribution of electric field in discharge region as well as for the distribution of current density of formed electron beam on the outlet of gun are given. Also the results for plasma boundary approximation, calculation of electrons trajectories in the guiding equipotential channel, as well as for the distribution of the density of focal beam current on the plane, located in the technological chamber outside the electron gun, are presented in the article.