Effect of frequency on microplasmas driven by microwave excitation

Abstract

The effect of excitation frequency on the breakdown voltage of a microwave (mw) microdischarge and its steady-state plasma parameters is studied by the self-consistent one-dimensional Particle-in-Cell Monte Carlo collisions model. It is found that for microdischarges in which the electron wall losses are significant, an increase in the mw frequency results in a decrease in the breakdown voltage. For conditions in which the electron wall losses become negligible, an increase in the frequency does not influence significantly the breakdown voltage. At the same time, for both regimes, the increase in the frequency results in an increase in the steady-state plasma density. The analysis of the steady-state plasma parameters have shown that the dominant electron heating mechanism is the Joule heating while the stochastic heating is negligible. Also, it is found that the electron energy distribution function consists of two electron groups, namely, slow and fast electrons. The presence of fast electrons in the plasma bulk indicates the non-local nature of microwave excited microdischarges.