Local permittivity measurement of dielectric materials based on the non-contact force curve of microwave atomic force microscopy

Abstract

We report a non-contact and quantitative method to measure the local permittivity of dielectric materials with a nanometer-scale spatial resolution. A theoretical model based on near-field approximation was developed to describe the effect of a microwave on the interaction between a probe and a sample. Under the non-contact mode, we successfully measured the force curves of Si, Al2O3, Ge, and ZrO2 using microwave atomic force microscopy and observed the variation in the force caused by the microwave. According to the established theoretical model, a quantitative non-contact evaluation of the local permittivity of dielectric materials was performed.