Electrohydrodynamic pumping in microsystems

Abstract

The physical principles behind the electrohydrodynamic (EHD) actuation in microsystems is presented by reviewing five different EHD micropumps. These are classified into two groups: micropumps that exert electric forces in the liquid bulk and micropumps that exert forces in the diffuse double layer. This review of five EHD micropumps allows us to analyse the EHD actuation ranging from very insulating liquids to electrolytic solutions.