Conditional Optimization of Solution Combustion Synthesis for Pioneered La 2 O 3 Nanostructures to Application as Future CMOS and NVMS Generations

Abstract

The Present Research paper discuses the synthesis and characterization of lanthanum oxide (La2O3) nanoparticles by using a very low cost Solution Combustion Method. We are using Acetamide as fuel in present method. In future, most of manufacturer of integrated circuits recently announced and introduced hafnium and lanthanum based high-κ dielectrics materials in their next CMOS generations and also Lanthanum oxides show some important applications such as luminescent devices, sensors, up-conversion materials, and catalytic fields. Now a day’s researches are focuses on “higher-κ” materials with a dielectric constant of above 30 in order to satisfy the demands for future CMOS applications. FTIR spectroscopy was done for observing the presence of La-O bond...