Fast multi-channel driver for high-voltage micromirrors switches

Abstract

The most popular micromirrors switches, work with a sinusoidal low-frequency carrier obtained by a simple generator with a rude shift-level circuitry. Aiming to the problem for the pulsed rectangulars carrier signals, more and more used in the digital and scanning bonded silicon mirrors, the analog amplifiers arranged to operate in a saturation region, decrease the sharpness of leading and trailing edges of a rectangular pulse envelope (i.e. audio amplifiers). This approach makes unusable a set of features of these actuators. The well-known systems, based on high-voltage logic ports, capable of resulting an output carrier that having the shape substantially a square waveform, require large current and are very expensive. In the proposed architecture, it is possible to reduce both the excessive and unnecessary spectral components resulting from the rapid rise and fall time of the rectangular envelope as also relax the current requirements with a dedicated circuitry arrangement that modifies the output source in a trapezoidal envelope. A new scheme for decreasing power requirements using a source degenerated logic port is introduced. This method, addresses these issues by tracking the output current with a very simple approach that doesn't require an additional consumption as most solutions do. © 2011 Springer Science+Business Media B.V.