Harmonic suppression of high-frequency power supply for ICP light based on frequency power modulation

Abstract

Newly-emerging inductively coupled plasma (ICP) light has high efficiency, long life-time and other comprehensive advantages. But, it's high-frequency power supply will produce conducted electromagnetic interference (EMI) that is hardly suppressed. The paper establishes the conducted EMI model of 150W ICP light's high-frequency power supply, and analyses conducted EMI's production mechanism at the fixed working frequency. Design the modified frequency power modulation algorithm with same frequency change step δ and energy pulse duration gradual change. The conducted EMI and optical power parameters tests indicate that modified frequency modulation can solve the conducted EMI problem well. And it can improve the ICP light's luminous efficiency. © 2012 Springer-Verlag.