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Book Chapter

SiCOI Structures. Technology and Characterization

  • Serre C
  • Peréz-Rodríguez A
  • Romano-Rodríguez A
  • et al.
Springer Netherlands, (2002), 17-29
DOI: 10.1007/978-94-010-0339-1_3
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Serre, C., Peréz-Rodríguez, A., Romano-Rodríguez, A., Morante, J. R., Esteve, J., Acero, M. C., … Skorupa, W. (2002). SiCOI Structures. Technology and Characterization. In Progress in SOI Structures and Devices Operating at Extreme Conditions (pp. 17–29). Springer Netherlands. https://doi.org/10.1007/978-94-010-0339-1_3

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