Surface profilometry

Abstract

A great number of research papers on profilometry have been presented, but few systems have been commercialized up to now. Especially three-dimensional profilometry (3D profilometry) [1] is one of the most important topics in the present academic study and in industrial research. Conventionally, a coordinate measuring machine (CMM) with a contact type of stylus (so-called touch probe or touch sensor) has been popular in various fields. However, recent rapid and remarkable progress in optical techniques and computer technology has been bringing novel noncontact type of 3D measuring machines. In addition to the traditional contact probe, a lot of non-noncontact probes based on laser triangulation or optical coaxial principle have become popular.