High dynamic range uniaxial force/torque sensor using metal foil and semiconductor strain gauge

Abstract

A force/torque sensor is often requird to delect small while its maximum load is also often large. In other words, the dynamic range of force/torque sensors should be higher. In order to extend the dynamic range of the force/torque sensor, a high dynamic range force/torque sensor that uses both semiconductor strain gauges and general strain gauges was developed. Experimental results show that the dynamic range can be extended without complicating the structure of the strain body.