MEMS transducers—An overview of how they work

Abstract

A transducer is a device that converts power from one form to another for purposes of measurement or control. Historically, the word “transducer” referred only to devices that converted mechanical stimuli such as force or pressure into an electrical signal, usually voltage. Today the definition has been broadened to include all forms of input stimuli—mechanical, electrical, fluidic, or thermal—and output signals other than electrical.