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Book Chapter

New Material for Thin Film Filament of Micromachined Hot-plate

  • Pollien A
  • Baborowski J
  • Ledermann N
  • et al.
Springer Berlin Heidelberg, (2001), 848-851
DOI: 10.1007/978-3-642-59497-7_201
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Pollien, A., Baborowski, J., Ledermann, N., & Muralt, P. (2001). New Material for Thin Film Filament of Micromachined Hot-plate. In Transducers ’01 Eurosensors XV (pp. 848–851). Springer Berlin Heidelberg. https://doi.org/10.1007/978-3-642-59497-7_201

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