Organic-Based Micropillar Structure Fabrication by Advanced Focused Ion Beam Milling Techniques

Abstract

In this study, we first report organic material based micropillar structures fabricated using advanced techniques based upon focused ion beam milling processes. Such a method provides a faster milling procedure as the beam of ions directly etches through the layers of the materials without damaging the organic material, unlike conventional dry or wet etching processes. It is very promising that FIB milling methods should be able to underpin organic-based photonic device research in the future.