Study of porous alumina porosity after pore widening process

Abstract

The porosity study of self-ordered porous alumina membranes (PAMs) after pore widening process is described. The PAMs were fabricated using aluminum foils oxidized in oxalic acid via a two step anodization process. The as-produced PAMs samples were subsequently etched in phosphoric acid solution to widen the pores. The morphology of several samples with modified pores was examined using scanning electron microscopy (SEM) and then the SEM images were analyzed in order to calculate the porosity of the PAMs. The porous alumina membranes with tunable geometrical properties can be applied in the fabrication of nanostructures. © 2007 IEEE.