Mechanical Properties of the TiAlSiN Coatings by Post Heat Treatments

Abstract

In this study, TiAlSiN coatings were deposited by cathodic arc evaporation from titanium, aluminum and silicon alloy targets in a reactive nitrogen atmosphere at substrate bias of −50 V. The as-deposited coatings were then subjected to post heat treatment at 400 o C in nitrogen atmosphere. The annealing treatment has an expected effect on the wear resistance. The TiAlSiN coating subjected to heat treatment in nitrogen atmosphere presented wear resistance better than the as-deposited coatings. The friction coefficient of the TiAlSiN coatings subjected at 400 o C in nitrogen atmosphere was decreased due to the effect of the structure modification.