Elemental Profiling of III-V MOSFET High-kDielectric Gate Stacks Using EELS Spectrum Imaging

Longo, P., Craven, A. J., Scott, J., Holland, M., & Thayne, I. (2008). Elemental Profiling of III-V MOSFET High-kDielectric Gate Stacks Using EELS Spectrum Imaging. In Microscopy of Semiconducting Materials 2007 (pp. 317–320). Springer Netherlands. https://doi.org/10.1007/978-1-4020-8615-1_69