Application to Semiconductors

  • LeBeau J
  • Klenov D
  • Stemmer S
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Abstract

In this chapter, we discuss the application of scanning transmission electron microscopy in the field of semiconductor research, using specific examples from the literature.

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LeBeau, J. M., Klenov, D. O., & Stemmer, S. (2011). Application to Semiconductors. In Scanning Transmission Electron Microscopy (pp. 523–536). Springer New York. https://doi.org/10.1007/978-1-4419-7200-2_12

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