In this chapter, we discuss the application of scanning transmission electron microscopy in the field of semiconductor research, using specific examples from the literature.
CITATION STYLE
LeBeau, J. M., Klenov, D. O., & Stemmer, S. (2011). Application to Semiconductors. In Scanning Transmission Electron Microscopy (pp. 523–536). Springer New York. https://doi.org/10.1007/978-1-4419-7200-2_12
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