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Conference Proceedings

Automated Multiscale measurement system for micro optical elements

Fringe 2009 - 6th International Workshop on Advanced Optical Metrology (2009) 584-591
DOI: 10.1007/978-3-642-03051-2_100
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Lyda, W., Burla, A., Haist, T., Zimmermann, J., Osten, W., & Sawodny, O. (2009). Automated Multiscale measurement system for micro optical elements. In Fringe 2009 - 6th International Workshop on Advanced Optical Metrology (pp. 584–591). Springer Science and Business Media Deutschland GmbH. https://doi.org/10.1007/978-3-642-03051-2_100

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