Thermoelectric Sensor with CuI Supported on Rough Glass

Abstract

Thermoelectric generators convert heat into a potential difference with arrays of p- and n-type materials, a process that allows thermal energy harvesting and temperature detection. Thermoelectric sensors have attracted interest in relation to the creation of temperature and combustible gas sensors due to their simple operation principle and self-powering ability. CuI is an efficient p-type thermoelectric material that can be readily produced from a Cu layer by an iodination method. However, the vapor iodination of Cu has the disadvantage of weak adhesion on a bare glass substrate due to stress caused by crystal growth, limiting microfabrication applications of this process. This work presents a rough soda-lime glass substrate with nanoscale cavities to support the growth of a CuI layer, showing good adhesion and enhanced thermoelectric sensitivity. A rough glass sample with nanocavities is developed by reactive ion etching of a photoresist-coated glass sample in which aggregates of carbon residuals and the accumulation of NaF catalyze variable etching rates to produce local isotropic etching and roughening. A thermoelectric sensor consists of 41 CuI/In-CoSb3 thermoelectric leg pairs with gold electrodes for electrical interconnection. A thermoelectric leg has a width of 25 μm, a length of 3 mm, and a thickness of 1 μm. The thermoelectric response results in an open-circuit voltage of 13.7 mV/K on rough glass and 0.9 mV/K on bare glass under ambient conditions. Rough glass provides good mechanical interlocking and introduces important variations of the crystallinity and composition in the supported thermoelectric layers, leading to enhanced thermopower.