Micro Alkaline Fuel Cell supported by MEMS-based Backbone

Abstract

This work presents the application of nitride membranes produced with Si-MEMS-technology as a platform to build up new membrane-electrode assemblies (MEA) for alkaline fuel cells. Active alkaline fuel cell MEAs were combined by integrating hydroxide permeable electrolyte into micro-channels of 1 μm diameter in 5 to 10 μm thick MEMS-based membranes. A platinum catalyst was sprayed onto the surface and an electric conductive layer was applied on top. Taking advance of the small form factor these fuel cells can be applied in small devices with low energy demand.