Nanogap ultrasonic actuator for non-contact control of levitated inertial sensor rotor

Abstract

In this paper we present an ultrasonic motor with a rotor which levitates creating an air bearing with smooth rotation at 100-600 rpm, whose motion can be controlled without contact. We demonstrate the use of a thermal actuator-driven gripper-actuator that can control the speed and direction of the rotor, without contact, while it is levitated. This same actuator can also be used to stop the rotor by direct mechanical contact. Voltages required for this actuation are in the 1-10 Volts, making the calibration platform CMOS compatible. In order to demonstrate the application of this rotor for inertial sensor calibration, we demonstrate the first integration of optically read accelerometers, read out while the rotor is spinning.