High speed time-of-flight displacement measurement based on dual-comb electronically controlled optical sampling

Abstract

We demonstrate a direct time-of-flight approach that utilizes dual-comb electronically controlled optical sampling (ECOPS) to measure small displacements. ECOPS is enabled by electrically controlling the repetition rate of one laser via an intracavity electric-optical modulator (EOM). The acquisition rate is set by the EOM modulation frequency, which is much higher than commonly used asynchronous optical sampling (ASOPS). In a proof-of-principle experiment, an 80-kHz acquisition rate is obtained with a pair of ∼105 MHz repetition rate Er-fiber lasers. At an average time of 30 ms, a measurement precision evaluated with Allan deviation reaches 26.1 nm for a 40-µm static displacement. In a dynamic measurement, a 500-Hz sinusoidal vibration with 15 µm amplitude has also been identified. The high-precision and high-speed displacement measurement technique can be potentially used in 3D surface profilometry of microelectronic step-structures and real-time monitoring of high frequency mechanical vibrations, etc.