This review gives an overview of the development of surface acoustic wave (SAW) based gyroscopes. Different types of SAW based gyroscope are first presented, which are categorized into standing-wave based or progressive-wave based gyroscopes according to their respective mechanisms. In addition, multi-axis detectable SAW based gyroscopes are also introduced in this review. Different principles, structures, production methods, and control technologies are analyzed.
CITATION STYLE
Oh, H., Lee, K. J., Lee, K., & Yang, S. S. (2015, December 1). Gyroscopes based on surface acoustic waves. Micro and Nano Systems Letters. Society of Micro and Nano Systems. https://doi.org/10.1186/s40486-015-0009-z
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