CITATION STYLE
Zorman, C. A., & Mehregany, M. (2004). Materials Aspects of Micro- and Nanoelectromechanical Systems. In Springer Handbook of Nanotechnology (pp. 203–224). Springer Berlin Heidelberg. https://doi.org/10.1007/3-540-29838-x_7
Mendeley helps you to discover research relevant for your work.